Design of pressure-sensing diaphragm for MEMS capacitance diaphragm gauge considering size effect
نویسندگان
چکیده
منابع مشابه
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ژورنال
عنوان ژورنال: AIP Advances
سال: 2018
ISSN: 2158-3226
DOI: 10.1063/1.5021374